... characteristics of a squeeze-film gas bearing. This squeeze bearing for a noncontact moving table uses piezoelectric actuators as an ultrasonic vibrator to make the bearing surface vibrate at the ultrasonic resonant frequency of the bearing plate. The squeeze-film pressure is generated in the gap beneath...

... ), pp. 43 – 48 . Kurita , M. , Yamazaki , T. , Kohira , H. , Matsumoto , M. , Tsuchiyama , R. , Xu , J. , Harada , T. , Inoue , Y. , Su , L. , and Kato , K. , 2002 , “ An Active-Head Slider with a Piezoelectric Actuator for Controlling Flying Height...