The effect of axially-varying clearance on microfabricated gas journal bearings is explored. This variation commonly arises from difficulties inherent to etching deep, narrow channels. Two types of clearance variation commonly observed in etched bearings are investigated: taper and bow. Both shapes are shown to have a detrimental effect on load capacity and bearing stability compared to a cylindrical bearing with the minimum clearance. For the same variation magnitude, taper is shown to have a more serious effect, including complete closure of the stability corridor at low speed for some cases. Methods are suggested for estimating variable-clearance bearing performance using cylindrical bearing data.

1.
Epstein, A. H., Senturia, S. D., Anathasuresh, G., Ayo´n, A., Breuer, K. S., Chen, K.-S., Ehrich, F. E., Esteve, E., Frechette, L., Gauba, G., Ghodssi, R., Groshenry, C., Jacobson, S., Kerrebrock, J. L., Lang, J. H., Lin, C.-C., London, A., Lopata, J., Mehra, A., Mur Miranda, J. O, Nagle, S., Orr, D. J., Piekos, E. S., Schmidt, M. A., Shirley, G., Spearing, S. M., Tan, C. S., Tzeng, Y.-S., and Waitz, I. A., 1997, “Micro-Heat Engines, Gas Turbines, and Rocket Engines—The MIT Microengine Project,” AIAA 97-1773, 28th AIAA Fluid Dynamics Conference, Snowmass Village, CO.
2.
Reynolds
,
D. B.
, and
Gross
,
W. A.
,
1962
, “
Experimental Investigation of Whirl in Self-Acting Air-Lubricated Journal Bearings
,”
ASLE Trans.
,
5
, pp.
392
403
.
3.
Cheng
,
H. S.
, and
Pan
,
C. H. T.
,
1965
, “
Stability Analysis of Gas-Lubricated, Self-Acting, Plain, Cylindrical, Journal Bearings of Finite Length, Using Galerkin’s Method
,”
J. Basic Engineering
,
87
, No.
1
, pp.
185
192
.
4.
Sternlicht
,
B.
, and
Winn
,
L. W.
,
1963
, “
On the Load Capacity and Stability of Rotors in Self-Acting Gas Lubricated Plain Cylindrical Journal Bearings
,”
J. Basic Engineering
,
85
, pp.
503
512
.
5.
Ayo´n
,
A. A.
,
Braff
,
R.
,
Lin
,
C. C.
,
Sawin
,
H. H.
, and
Schmidt
,
M. A.
,
1999
, “
Characterization of a Time Multiplexed Inductively Coupled Plasma Etcher
,”
J. Electrochem. Soc.
,
146
, No.
1
, pp.
339
349
.
6.
Piekos, E. S., 2000, “Numerical Simulation of Gas-Lubricated Journal Bearings for Microfabricated Machines,” Ph.D. dissertation, Massachusetts Institute of Technology, Department of Aeronautics and Astronautics, Cambridge, MA.
7.
Piekos
,
E. S.
, and
Breuer
,
K. S.
,
1999
, “
Pseudospectral Orbit Simulation of Nonideal Gas-Lubricated Journal Bearings for Microfabricated Turbomachines
,”
J. Tribology
,
121
, No.
3
, pp.
604
609
.
8.
Castelli
,
V.
, and
Elrod
,
H. G.
,
1965
, “
Solution of the Stability Problem for 360 deg. Self-Acting, Gas-Lubricated Bearings
,”
J. Basic Engineering
,
87
, No.
1
, pp.
199
212
.
9.
Boyd, J. P., 1989, “Chebyshev and Fourier Spectral Methods,” editors, Lecture Notes in Engineering, in C. A. Brebbia and S. A. Orszag, eds., Vol. 49, Springer-Verlag, New York.
10.
Hamrock, B. J., 1994, Fundamentals of Fluid Film Lubricaton, McGraw-Hill Series in Mechanical Engineering, McGraw-Hill, Inc., New York.
11.
Orr, D. J., 2000. “Macro-Scale Investigation of High Speed Gas Bearings for MEMS Devices,” Ph.D. dissertation, Massachusetts Institute of Technology, Department of Aeronautics and Astronautics, Cambridge, MA.
12.
Wilson
,
D. S.
,
1966
, “
The Effect of Geometry Variations on Hydrodynamic Bearing Performance
,”
ASLE Trans.
,
9
, pp.
411
419
.
13.
Raimondi
,
A. A.
,
1961
, “
A Numerical Solution for the Gas Lubricated Full Journal Bearing of Finite Length
,”
ASLE Trans.
,
4
, pp.
131
155
.
You do not currently have access to this content.