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Keywords: rapid thermal processing
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Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. November 2006, 128(4): 837–843.
Published Online: March 23, 2006
... 03 2006 thermoforming moulding equipment rapid thermal processing cooling thin wall structures shell casting thermal resistance thermoplastic processing rapid heating embossing welding contact heating During thermoplastic processing, e.g., molding and forming...
Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. February 2005, 127(1): 148–156.
Published Online: March 21, 2005
... simulation of the temperature and concentration fields during rapid thermal processing was developed accounting for distribution gradient orientations and decomposing heat/mass transfer across the coating from conduction in the substrate. The model is based on analytical expressions employing heat and mass...
Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. August 2005, 127(3): 564–571.
Published Online: September 18, 2004
...Shih-Yu Hung; Ching-Kong Chao A fast temperature ramp of rapid thermal processing (RTP) with convective cooling used to shorten the cooling time for the wafer is presented in this paper. Based on thermal and stress analyses, the behavior of the highly coupled physics in RTP, such as radiative heat...
Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. August 2003, 125(3): 504–511.
Published Online: July 23, 2003
...Ching-Kong Chao; Shih-Yu Hung; Cheng-Ching Yu The concept of rapid thermal processing has many potential applications in microelectronics manufacturing, but the details of chamber design remains an active area of research. In this work the influence of lamps radius on the thermal stresses...