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Keywords: precision positioning
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Journal Articles
Publisher: ASME
Article Type: Special Section: Micromanufacturing
J. Manuf. Sci. Eng. June 2008, 130(3): 031112.
Published Online: May 16, 2008
... environments. Such stages cannot be seamlessly integrated with different manufacturing environments because they lack the structural robustness to withstand external forces and temperature gradients, and the ability to occupy a constrained volume. precision positioning flexure stage microscale...