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Keywords: oxidation
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Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. November 2004, 126(4): 801–806.
Published Online: February 4, 2005
...Jeong Woo Park; Noritaka Kawasegi; Noboru Morita; Deug Woo Lee The TNL (Tribo Nanolithography) method in aqueous solution uses the atomic force microscopy as a machining tool for the nanoscale fabrication of silicon. A specially designed cantilever with a diamond tip allows the formation of oxide...
