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Keywords: nanolithography
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. August 2011, 133(4): 041005.
Published Online: July 20, 2011
...Sourabh K. Saha; Martin L. Culpepper Dip pen nanolithography (DPN) is a flexible nanofabrication process for creating 2-D nanoscale features on a surface using an “inked” tip. Although a variety of ink-surface combinations can be used for creating 2-D nanofeatures using DPN, the process has not yet...
Journal Articles
Publisher: ASME
Article Type: Special Issue On Nanomanufacturing
J. Manuf. Sci. Eng. June 2010, 132(3): 030907.
Published Online: May 26, 2010
... 2010 nanofabrication nanolithography nanostructured materials photonic crystals scanning electron microscopy Nanoimprint lithography (NIL) techniques were regarded as parallel nanofabrication methods for high-resolution and high-aspect-ratio features ( 1 2 3 ). NIL has...
Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. November 2004, 126(4): 801–806.
Published Online: February 4, 2005
...Jeong Woo Park; Noritaka Kawasegi; Noboru Morita; Deug Woo Lee The TNL (Tribo Nanolithography) method in aqueous solution uses the atomic force microscopy as a machining tool for the nanoscale fabrication of silicon. A specially designed cantilever with a diamond tip allows the formation of oxide...