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Keywords: flexure stage
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Journal Articles
Publisher: ASME
Article Type: Special Section: Micromanufacturing
J. Manuf. Sci. Eng. June 2008, 130(3): 031112.
Published Online: May 16, 2008
... is placed in contact with a platinum substrate. A voltage is applied between the pipette and substrate to induce copper metal to form out of solution. A single-axis flexure stage is used to move the pipette away from the substrate during deposition, to draw out the wires. Burleigh 300 series piezoinchworm...