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Keywords: anomaly detection
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Journal Articles
Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. June 2022, 144(6): 061008.
Paper No: MANU-21-1317
Published Online: December 3, 2021
... sets to classify faults. Experiments in a case study on semiconductor manufacturing measurement data are performed to explore the relationship between latent features extracted and anomaly detection performance. The application of the proposed algorithm achieves a true positive detection rate of over...
Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Manuf. Sci. Eng. March 2019, 141(3): 031002.
Paper No: MANU-18-1094
Published Online: January 17, 2019
...Mohamad Mahmoudi; Ahmed Aziz Ezzat; Alaa Elwany A growing research trend in additive manufacturing (AM) calls for layerwise anomaly detection as a step toward enabling real-time process control, in contrast to ex situ or postprocess testing and characterization. We propose a method for layerwise...