This paper presents the development of a six-degree-of-freedom (DOF) geometric error measurement (6GEM) system that can be applied to the simultaneous measurement of six geometric error components of the moving axes of a meso-scale machine tool (mMT). The system consists of a laser module constructed by a cube beam splitter and a pigtailed laser diode, three two-dimensional position sensitive detectors (PSDs), and an additional cube beam splitter. The laser module moving with the positioning system of the developed mMT testbed generates two perpendicular laser beams, one of which is further divided into two laser beams at the second cube beam splitter. These three laser beams are detected by the three PSDs, and the full pose of the laser module is then calculated simultaneously by forward and inverse kinematic computations. The calculated full pose of the laser module is translated into six-DOF geometric errors of the mMT testbed. A series of experiments are performed to demonstrate the effectiveness and accuracy of the proposed 6GEM system. The experimental results show that the measurement accuracy of the 6GEM system was better than for translational error components and for angular error components.
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e-mail: sangwonl@umich.edu
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November 2005
Technical Papers
Development of a Six-Degree-of-Freedom Geometric Error Measurement System for a Meso-Scale Machine Tool
Sang Won Lee,
Sang Won Lee
Research Fellow
S. M. Wu Manufacturing Research Center,
e-mail: sangwonl@umich.edu
University of Michigan
, Ann Arbor, MI 48109
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Rhett Mayor,
Rhett Mayor
President
Powerix Technologies
, Ann Arbor, MI 48105
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Jun Ni
Jun Ni
Professor
S. M. Wu Manufacturing Research Center,
University of Michigan
, Ann Arbor, MI 48109
Search for other works by this author on:
Sang Won Lee
Research Fellow
S. M. Wu Manufacturing Research Center,
University of Michigan
, Ann Arbor, MI 48109e-mail: sangwonl@umich.edu
Rhett Mayor
President
Powerix Technologies
, Ann Arbor, MI 48105
Jun Ni
Professor
S. M. Wu Manufacturing Research Center,
University of Michigan
, Ann Arbor, MI 48109J. Manuf. Sci. Eng. Nov 2005, 127(4): 857-865 (9 pages)
Published Online: March 11, 2005
Article history
Received:
November 18, 2004
Revised:
March 11, 2005
Citation
Lee, S. W., Mayor, R., and Ni, J. (March 11, 2005). "Development of a Six-Degree-of-Freedom Geometric Error Measurement System for a Meso-Scale Machine Tool." ASME. J. Manuf. Sci. Eng. November 2005; 127(4): 857–865. https://doi.org/10.1115/1.2035692
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