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Keywords: suspended microbridge
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Journal Articles
Leslie M. Phinney, Justin R. Serrano, Edward S. Piekos, John R. Torczynski, Michael A. Gallis, Allen D. Gorby
Journal:
Journal of Heat Transfer
Article Type: Research Papers
J. Heat Transfer. July 2010, 132(7): 072402.
Published Online: April 28, 2010
... noncontinuum gas-phase heat-transfer model low-pressure effects suspended microbridge The environmental conditions inside a packaged MEMS device dictate its performance and long-term reliability. Reducing packaging pressures below ambient decreases gas damping effects and gas-phase heat transfer...
Journal Articles
Journal:
Journal of Heat Transfer
Article Type: Micro/Nanoscale Heat Transfer—Part Ii
J. Heat Transfer. April 2009, 131(4): 043201.
Published Online: February 11, 2009
... technique. The microbridges with lengths from 200 μ m to 500 μ m were designed and fabricated using the Sandia National Laboratories SUMMiT V™ surface micromachining process. The advantages and disadvantages of the two experimental methods are examined for suspended microbridge geometries. The differences...
