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Keywords: polycrystalline silicon
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Journal Articles
Publisher: ASME
Article Type: Micro/Nanoscale Heat Transfer—Part Ii
J. Heat Mass Transfer. April 2009, 131(4): 043201.
Published Online: February 11, 2009
..., experimental determination of the thermal properties becomes more difficult. In this study, the thermal conductivity of polycrystalline silicon (polysilicon) microbridges are measured with the transient 3 ω technique and compared with measurements on the same structures using a steady state Joule heating...