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Keywords: optical arrays
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Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Heat Mass Transfer. January 2007, 129(1): 37–43.
Published Online: June 16, 2006
... optical arrays There has been a continuous need to increase the areal density of microelectronic devices. To further increase the areal density without relying on expensive light sources of shorter wavelength, one has to seek nonconventional approaches, for examples, solid immersion lens ( 1...