Thin films (, ) of deposited on Si and were heated to . Their reflectance in the infrared was measured using a Fourier transform infrared spectrometer equipped with a multiple angle reflectometer before and after exposure to the high-temperature heat treatment. An interfacial layer formed by the diffusion of Si from the substrate into the deposited film was observed using Auger depth profiling, and the effect of this interfacial layer on the reflectance was measured. Using a least squares optimization technique coupled with an optical admittance algorithm, the multiple angle reflectance data were used to calculate the optical constants of the as deposited film, crystalline , and the interfacial layer in the 1.6 to range. The interfacial layer formed due to exposure to high temperature was found to be more absorptive than the crystalline .
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Technical Papers
Change in Radiative Optical Properties of Thin Films due to High-Temperature Heat Treatment
Ramesh Chandrasekharan,
Ramesh Chandrasekharan
Department of Mechanical and Industrial Engineering,
University of Illinois at Urbana-Champaign
, 1206 W. Green Street, Urbana, IL 61801
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Shaurya Prakash,
Shaurya Prakash
Department of Mechanical and Industrial Engineering,
University of Illinois at Urbana-Champaign
, 1206 W. Green Street, Urbana, IL 61801
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Mark A. Shannon,
Mark A. Shannon
Department of Mechanical and Industrial Engineering,
e-mail: mshannon@uiuc.edu
University of Illinois at Urbana-Champaign
, 1206 W. Green Street, Urbana, IL 61801
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R. I. Masel
R. I. Masel
Department of Chemical and Biomolecular Engineering,
University of Illinois at Urbana-Champaign
, 600 South Mathews, Urbana, IL 61801
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Ramesh Chandrasekharan
Department of Mechanical and Industrial Engineering,
University of Illinois at Urbana-Champaign
, 1206 W. Green Street, Urbana, IL 61801
Shaurya Prakash
Department of Mechanical and Industrial Engineering,
University of Illinois at Urbana-Champaign
, 1206 W. Green Street, Urbana, IL 61801
Mark A. Shannon
Department of Mechanical and Industrial Engineering,
University of Illinois at Urbana-Champaign
, 1206 W. Green Street, Urbana, IL 61801e-mail: mshannon@uiuc.edu
R. I. Masel
Department of Chemical and Biomolecular Engineering,
University of Illinois at Urbana-Champaign
, 600 South Mathews, Urbana, IL 61801J. Heat Transfer. Jan 2007, 129(1): 27-36 (10 pages)
Published Online: May 3, 2006
Article history
Received:
October 14, 2005
Revised:
May 3, 2006
Citation
Chandrasekharan, R., Prakash, S., Shannon, M. A., and Masel, R. I. (May 3, 2006). "Change in Radiative Optical Properties of Thin Films due to High-Temperature Heat Treatment." ASME. J. Heat Transfer. January 2007; 129(1): 27–36. https://doi.org/10.1115/1.2401195
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