The CFD performance estimation of turbo booster vacuum pump shows the axial vortex and back flow is evident when the mass flow rate is increased. The pressure is increased from the pump inlet to the outlet for the low mass flow rate cases. But for high mass flow rate cases, the pressure is increased until the region near the end of the rotor then decreased. The calculated inlet pressure, compression ratio, and pumping speed is increased, decreased, and decreased, respectively, when the mass flow rate is increased. The pumping speed is increased when the rotor speed is increased.

1.
Ino
,
K.
,
Sekine
,
K.
,
Shibata
,
T.
,
Ohmi
,
T.
, and
Maejima
,
Y.
,
1998
, “
Improvement of Turbomolecular Pumps for Ultraclean, Low-Pressure, and High-Gas-Flow Processing
,”
J. Vac. Sci. Technol. A
,
16
, pp.
2703
2710
.
2.
Holweck
,
F.
,
1923
, “
Pompe Mole´culaire He´licoidale
,”
C. R. Acad. Sci
,
43
, pp.
177
124
.
3.
Levi
,
G.
,
1992
, “
Combination of Turbomolecular Pumping Stages and Molecular Drag Stages
,”
J. Vac. Sci. Technol. A
,
10
, pp.
2619
2622
.
4.
Sawada
,
T.
,
Nakamura
,
M.
, and
Abumiya
,
A.
,
1992
, “
Spiral Grooved Vacuum Pump Working in High Pressure Range
,”
Vacuum
,
43
, pp.
1097
1099
.
5.
Nanbu
,
K.
, and
Igarashi
,
S.
,
1992
, “
Three-Dimensional Low-Density Flows in the Spiral Grooves of a Turbo-Molecular Pump
,”
Comput. Fluids
,
21
, pp.
221
228
.
6.
Spagnol
,
M.
,
Cerruti
,
R.
, and
Helmer
,
J. C.
,
1998
, “
Turbomolecular Pump Design for High Pressure Operation
,”
J. Vac. Sci. Technol. A
,
16
, pp.
1151
1156
.
7.
UNIC, 1995, UNIC General Purpose CFD Design Tool, Engineering Sciences, Inc., AL.
You do not currently have access to this content.