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Keywords: nanotechnology
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Journal Articles
Publisher: ASME
Article Type: Dynamic Modeling Control And Manipulation At The Nanoscale
J. Dyn. Sys., Meas., Control. November 2009, 131(6): 061106.
Published Online: November 6, 2009
... ,” IEEE. Trans. Autom. Sci. Eng. 1545-5955 , 3 ( 3 ), pp. 199 – 207 . 10.1109/TASE.2006.875534 Schitter , G. , Allgöwer , F. , and Stemmer , A. , 2004 , “ A New Control Strategy for High-Speed Atomic Force Microscopy ,” Nanotechnology 0957-4484 , 15 ( 1 ), pp. 108 – 114...
Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Dyn. Sys., Meas., Control. November 2007, 129(6): 777–785.
Published Online: January 23, 2007
... and precisely position an additional payload of 2 kg . Its potential applications include semiconductor manufacturing, microfabrication and assembly, nanoscale profiling, and nanoindentation. actuators assembling capacitive sensors light interferometers magnetic levitation nanotechnology permanent...
Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Dyn. Sys., Meas., Control. September 2005, 127(3): 433–442.
Published Online: August 24, 2004
...Jie Gu; Won-jong Kim; Shobhit Verma This paper presents a novel magnetically levitated (maglev) stage developed to meet the ever-increasing precise positioning requirements in nanotechnology. This magnetic levitator has 6 independent linear actuators necessary and sufficient to generate all 6...