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Keywords: nanometer positioning
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Dyn. Sys., Meas., Control. March 2010, 132(2): 021011.
Published Online: February 9, 2010
... 24 11 2009 09 02 2010 09 02 2010 actuators control system synthesis fasteners nanomechanics position control precision engineering servomotors three-term control nanometer positioning ball screw PID controller saturation The fast development...
