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Keywords: microfabrication
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Journal Articles
Journal Articles
Publisher: ASME
Article Type: Dynamic Modeling Control And Manipulation At The Nanoscale
J. Dyn. Sys., Meas., Control. November 2009, 131(6): 061104.
Published Online: November 6, 2009
... 06 11 2009 atomic force microscopy cantilevers microactuators microfabrication microsensors Nanotechnology has a profound influence on current research and technology. Almost every field of modern technology and manufacturing utilizes techniques or knowledge gained from nanoscale...