... demonstrates that wafer-level CGS metrology provides a quick and accurate alternative to other measurements. It also demonstrates the accuracy of plate theory in modeling thin film-substrate systems, even in the presence of curvature discontinuities 18 03 2005 14 10 2005 tungsten...

.... In one instance a 700 nm spherical diamond tip was used for tungsten as noted. Since the Fe-3wt%Si and Au were not published elsewhere, these are shown in detail in Table 2 . The Fe-3wt%Si tip used to determine strain gradient was relatively sharp and since it was a three-sided Berkovich, an appropriate...