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Keywords: curvature measurement
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Journal Articles
Michal A. Brown, Tae-Soon Park, Ares Rosakis, Ersan Ustundag, Young Huang, Nobumichi Tamura, Bryan Valek
Journal:
Journal of Applied Mechanics
Publisher: ASME
Article Type: Technical Papers
J. Appl. Mech. September 2006, 73(5): 723–729.
Published Online: October 14, 2005
... curvatures across the wafer. The results are also compared with a theoretical model based on elastic plate analysis of the axisymmetric biomaterial film-substrate system. Slope and curvature measurements by XRD and by CGS compare very well with each other and with theory. The favorable comparison...
Journal Articles
Journal:
Journal of Applied Mechanics
Publisher: ASME
Article Type: Technical Papers
J. Appl. Mech. March 2001, 68(2): 298–303.
Published Online: October 19, 2000
... for a spherical initial curvature. The results are particularly discussed in relation to curvature measurements on Silicon substrates. 2 The dimensionless displacement correction f ¯ = 2 w c / a 2 T β α α 1 as a function of dimensionless radius r...
