Design Innovation Paper

Kinematic Synthesis of a D-Drive MEMS Device With Rigid-Body Replacement Method

[+] Author and Article Information
Paolo Sanò

Department of Mechanical and Aerospace Engineering,
Sapienza University of Rome,
Rome 00184, Italy
e-mail: sano.784531@studenti.uniroma1.it

Matteo Verotti

Department of Industrial Engineering,
University of Trento,
Povo 38123, Italy;
ProM Facility,
Trentino Sviluppo S.p.A.,
Rovereto 38068, Italy
e-mail: matteo.verotti@unitn.it

Paolo Bosetti

Department of Industrial Engineering,
University of Trento,
Povo 38123, Italy;
ProM Facility,
Trentino Sviluppo S.p.A.,
Rovereto 38068, Italy
e-mail: paolo.bosetti@unitn.it

Nicola P. Belfiore

Department of Engineering,
Universitá degli Studi Roma Tre,
Rome 00146, Italy
e-mail: nicolapio.belfiore@uniroma3.it

1Corresponding author.

Contributed by the Design Innovation and Devices of ASME for publication in the JOURNAL OF MECHANICAL DESIGN. Manuscript received September 5, 2017; final manuscript received March 24, 2018; published online April 25, 2018. Assoc. Editor: David Myszka.

J. Mech. Des 140(7), 075001 (Apr 25, 2018) (10 pages) Paper No: MD-17-1606; doi: 10.1115/1.4039853 History: Received September 05, 2017; Revised March 24, 2018

In this paper, a microsystem with prescribed functional capabilities is designed and simulated. In particular, the development of a straight line path generator micro electro mechanical system (MEMS) device is presented. A new procedure is suggested for avoiding branch or circuit problems in the kinematic synthesis problem. Then, Ball's point detection is used to validate the obtained pseudo-rigid body model (PRBM). A compliant MEMS device is obtained from the PRBM through the rigid-body replacement method by making use of conjugate surfaces flexure hinges (CSFHs). Finally, the functional capability of the device is investigated by means of finite element analysis (FEA) simulations and experimental testing at the macroscale.

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Grahic Jump Location
Fig. 1

Nomenclature for the generic four-bar linkage

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Fig. 2

Design parameters: target path (y = 10) and frame constraint region (square of side 20 and center in (10, 5))

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Fig. 3

Flowchart LM algorithm, where λ=10−3, δ=10−6, and εmax=0.5

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Fig. 4

Four-bar linkage resulting from the optimization process, coupler point curve (solid line) and target path (dotted line)

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Fig. 5

Configuration, inflection circle (thin line), cubic of stationary curvature (thick line), and Ball's point B in the tenth pose

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Fig. 6

Ball's points locus for the 20 adjacent configurations corresponding to the 20 precision points

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Fig. 7

Rigid-body replacement: PRBM (black) and MEMS device (gray)

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Fig. 8

Comb-drive geometric parameters

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Fig. 9

Detail of the refined mesh in flexure and fingers of the comb drive

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Fig. 10

Total deformation corresponding to the applied voltage of 150 V and undeformed wireframe

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Fig. 11

Force magnitudes exerted by each comb drive and maximum values of the MPS

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Fig. 12

Path followed by the MEMS device tip

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Fig. 13

FEA simulation setup, mesh detail, and deformed configuration corresponding to F = 16 N

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Fig. 14

von Mises equivalent stress distribution on the flexures for F = 16 N

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Fig. 15

Polymethyl methacrylate sample

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Fig. 16

Tracking of the compliant mechanism tip: reference frame, calibration distance (10 mm), marker enclosed in the search region (dotted square), tracked points (circles), and acquired path on the x - y plane (on the right)

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Fig. 17

Tip path resulting from FEA and experimental test (range 0–40 mm)

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Fig. 18

Tip path resulting from FEA and experimental test (range 0–30 mm)




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