Design Innovation Paper

Kinematic Synthesis of a D-Drive MEMS Device through the Rigid-Body Replacement Method

[+] Author and Article Information
Paolo Sanò

Department of Mechanical and Aerospace Engineering Sapienza University of Rome Rome, Italy 00184

Matteo Verotti

Department of Industrial Engineering University of Trento Povo, Italy 38123

Paolo Bosetti

Department of Industrial Engineering University of Trento Povo, Italy 38123

Nicola Pio Belfiore

Department of Engineering Universitá degli Studi Roma Tre Roma, Italy 00146

1Corresponding author.

ASME doi:10.1115/1.4039853 History: Received September 05, 2017; Revised March 24, 2018


In this paper, a microsystem with prescribed functional capabilities is designed and simulated. In particular, the development of a straight line path generator MEMS device is presented. A new procedure is suggested for avoiding branch or circuit problems in the kinematic synthesis problem. Then, Ball’s point detection is used to validate the obtained pseudo-rigid body model (PRBM). A compliant Micro Electro Mechanical System (MEMS) device is obtained from the PRBM through the rigid-body replacement method, by making use of Conjugate Surfaces Flexure Hinges (CSFHs). Finally, the functional capability of the device is investigated by means of FEA simulations and experimental testing at the macroscale.

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