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Technical Briefs

Architectures of Translational Parallel Mechanism for MEMS Fabrication

[+] Author and Article Information
Hagay Bamberger

RAFAEL-Advanced Defense Systems Ltd., Robotics Laboratory-Technion, P.O. Box 5218, Kfar Hasidim 20400, Israelhagayb@rafael.co.il

Alon Wolf

 Biorobotics and Biomechanics Lab, Technion, Haifa 32000, Israelalonw@technion.ac.il

Moshe Shoham

 Robotics Laboratory, Technion, Haifa 32000, Israelshoham@technion.ac.il

J. Mech. Des 130(8), 084502 (Jul 11, 2008) (8 pages) doi:10.1115/1.2936933 History: Received September 09, 2007; Revised March 26, 2008; Published July 11, 2008

Manufacturing techniques, especially in the microscale, determine the type of joints, links, and actuators available for the designer, and as a result, the possible kinematic architectures of the designed mechanism. This paper discusses the design constraints imposed by current microelectromechanical system (MEMS) fabrication techniques, and how they affect the feasible kinematic architectures of microrobots. In particular, three degree-of-freedom translational mechanisms are investigated, and all possible nonoverconstrained kinematic architectures under limitations imposed by MEMS fabrication techniques are derived.

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Copyright © 2008 by American Society of Mechanical Engineers
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Figures

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Figure 1

Up-scale model of the nonsingular architecture, in which the platform is parallel to the base (19). Each limb prevents platform rotation about its dashed line direction.

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Figure 2

Three DOF translational parallel mechanism

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Figure 3

Links and joints in a manufacturing configuration

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Figure 4

Perspective view on the kinematical architecture

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Figure 5

The platform and one of the limbs

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Figure 6

Type II architecture, with three, four, and five passive joints in each limb

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Figure 7

Typical link of Limb 3 of Type II architecture

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