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Journal of Mechanical Design | Volume 130 | Issue 3 | Technical Brief
Technical Briefs

Components, Building Blocks, and Demonstrations of Spherical Mechanisms in Microelectromechanical Systems

[+] Author and Article Information
Craig P. Lusk1

Department of Mechanical Engineering, University of South Florida, 4202 East Fowler Avenue ENB 118, Tampa, FL 33620-5350

Larry L. Howell

Department of Mechanical Engineering, Brigham Young University, Provo, UT 84602lhowell@et.byu.edu

1

Corresponding author.

J. Mech. Des 130(3), 034503 (Feb 05, 2008) (4 pages) doi:10.1115/1.2829914 History: Received April 20, 2006; Revised May 22, 2007; Published February 05, 2008
Article
References
Figures
Citing Articles

Microelectromechanical systems (MEMS) are usually fabricated using planar processing methods, which complicates the design of devices capable of complex motions. For applications that need a micromechanism that rotates out of the plane of fabrication with an in-plane rotational input, or that rotates spatially about a point, spherical kinematics may represent an appropriate solution. This paper describes the design of spherical mechanisms for MEMS including the design of joints and links, and what may be the first demonstration of two spherical micromechanism building blocks: the spherical four-bar micromechanism and the spherical slider-crank micromechanism. Two other micromechanisms are demonstrated to illustrate how the building block devices may be used to create more complex devices.
FIGURES IN THIS ARTICLE
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Copyright © 2008 by American Society of Mechanical Engineers
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References

1
Fukushige, T., Hata, S., and Shimokohbe, A., 2005, “A MEMS Conical Spring Actuator Array,” J. Microelectromech. Syst., 44 , pp. 243–253.
2
Krulevitch, P., Bierden, P., Bifano, T., Carr, E., Dimas, C., Dyson, H., Helmbrecht, M., Kurczynski, P., Muller, R., Olivier, S., Peter, Y.-A., Sadoulet, B., Solgaard, O., and Yang, E. H., 2003, “MOEMS Spatial Light Modulator Development at the Center for Adaptive Optics,” Proc. SPIE, 4983 , pp. 227–233.
3
Pister, K. S. J., Judy, M., Burgett, S., and Fearing, S., 1992, “Microfabricated Hinges,” Sens. Actuators  [CrossRef], 33 (3), pp. 249–256.
4
Koester, D. A., Cowen, A., Mahadevan, R., Stonefield, M., and Hardy, B., 2003, “PolyMUMPS Design Handbook, Revision 10.0,” MEMSCAP.
5
McCarthy, J. M., 2000, "Geometric Design of Linkages", Springer, New York.
6
Martin, D., and Murray, A., 2002, “Developing Classifications for Synthesizing, Refining, and Animating Planar Mechanisms,” Proceedings of the 2002 ASME Design Engineering Technical Conference , Montreal, Sept.
7
Chiang, C. H., 1988, "Kinematics of Spherical Mechanisms", Cambridge University Press, New York.
8
Lusk, C., and Howell, L., 2004, “A Micro Helico-Kinematic Platform via Spherical Crank-Sliders,” "Proceedings of the International Mechanical Engineering Conference and Exposition (IMECE)", Anaheim, CA, Nov. 13–19.
9
Jensen, B., Howell, L., and Salmon, L., 1999, “Design of Two-Link, In-Plane, Bistable Compliant Micro-Mechanisms,” ASME J. Mech. Des.  [CrossRef], 121 , pp. 416–423.
10
Lusk, C. P., and Howell, L. L., 2008, “Spherical Bistable Micromechanism,” ASME J. Mech. Des., 130 , in press.

Figures

Grahic Jump Location
+SEM of (a) a substrate hinge and (b) a pin joint
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SEM of (a) a substrate hinge and (b) a pin joint
Figure 1

SEM of (a) a substrate hinge and (b) a pin joint

Grahic Jump Location
+SEMs of a released hinge: (a) in its fabricated position and (b) in an out-of-plane configuration.
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SEMs of a released hinge: (a) in its fabricated position and (b) in an out-of-plane configuration.
Figure 2

SEMs of a released hinge: (a) in its fabricated position and (b) in an out-of-plane configuration.

Grahic Jump Location
+SEM of a spherical four-bar micromechanism. (a) The mechanism in its fabricated position. (b) The mechanism after actuation.
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SEM of a spherical four-bar micromechanism. (a) The mechanism in its fabricated position. (b) The mechanism after actuation.
Figure 3

SEM of a spherical four-bar micromechanism. (a) The mechanism in its fabricated position. (b) The mechanism after actuation.

Grahic Jump Location
+SEMs of a spherical slider-crank micromechanisms implemented using (a) a small pin joint and (b) a large sliding ring within a fixed rail
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SEMs of a spherical slider-crank micromechanisms implemented using (a) a small pin joint and (b) a large sliding ring within a fixed rail
Figure 4

SEMs of a spherical slider-crank micromechanisms implemented using (a) a small pin joint and (b) a large sliding ring within a fixed rail

Grahic Jump Location
+Images of a MHKP in (a) its fabricated position and (b) an actuated position. The MHKP uses spherical slider cranks to move a platform in a direction normal to the substrate.
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Images of a MHKP in (a) its fabricated position and (b) an actuated position. The MHKP uses spherical slider cranks to move a platform in a direction normal to the substrate.
Figure 5

Images of a MHKP in (a) its fabricated position and (b) an actuated position. The MHKP uses spherical slider cranks to move a platform in a direction normal to the substrate.

Grahic Jump Location
+SEM of the SBM in (a) its fabricated position (the first stable position), and (b) its second stable position (10)
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SEM of the SBM in (a) its fabricated position (the first stable position), and (b) its second stable position (10)
Figure 6

SEM of the SBM in (a) its fabricated position (the first stable position), and (b) its second stable position (10)

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