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Research Papers

Development of a Fabrication Process for the Manufacturing of a Microspherical Probe for Coordinate Measuring Machine Applications

[+] Author and Article Information
H. Ji1

J. Chua

School of Advanced Manufacturing and Mechanical Engineering,  University of South Australia, Mawson Lakes Boulevard, Mawson Lakes, South Australia 5095, Australia

H.-Y. Hsu

School of Advanced Manufacturing and Mechanical Engineering,  University of South Australia, Mawson Lakes Boulevard, Mawson Lakes, South Australia 5095, AustraliaHung-Yao.Hsu@unisa.edu.au

A. B. Wedding

School of Electrical and Information Engineering,  University of South Australia, Mawson Lakes Boulevard, Mawson Lakes, South Australia 5095, AustraliaBruce.Wedding@unisa.edu.au

1

Corresponding author.

J. Mech. Des 133(11), 111003 (Nov 11, 2011) (6 pages) doi:10.1115/1.4005084 History: Received May 17, 2011; Revised September 01, 2011; Published November 11, 2011; Online November 11, 2011

In recent years, downscaled coordinate measuring machines (CMMs) are in demand and bring challenges to the development of micro/nanoscale probes for a variety of microscale structure measurement applications. A working prototype apparatus is developed in which a microspherical optical fiber probe tip is created from a strand of standard single mode silica optical fiber using an electric discharge technique. The Taguchi method has been used to investigate the general effects of probe fabrication conditions that result in controllable fabrication of a quality probe tip. With proper control of the process parameters, spherical optical fiber probe tips with the desired diameters in the range of 133–360 μm with a diameter variance within 3% and minimum spherical tip center offset of about 2.2 μm have been achieved. An economical and flexible technique for the fabrication of a quality microspherical probe for micro/nano-CMM application is developed in this work.

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Copyright © 2011 by American Society of Mechanical Engineers
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Figures

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Figure 1

Schematic diagram of the electric discharge tip fabrication apparatus

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Figure 2

Orientation of the fiber between electrodes: (a) horizontal, (b) vertical with fiber end upward, and (c) vertical with fiber end downward

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Figure 3

Image taken during the fabrication process with fiber spherical tip forming within the discharge

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Figure 4

(a) Schematic of the probe tip center offset d from the stem center axis D-D′. (b) Image processing of an actual tip.

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Figure 5

Response plots of (a) mean spherical tip diameters (in μm) and (b) mean tip center offset (in μm), corresponding to the two levels of each control factor

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