Research Papers

Reliability Based Design Optimization of MEMS Considering Pull-In

[+] Author and Article Information
Michael Raulli

 Sensis Corporation, 5717 Enterprise Parkway, East Syracuse, NY 13057mraulli@sensis.com

Kurt Maute1

Department of Aerospace Engineering Sciences, University of Colorado, Boulder, CO 80309-04029maute@colorado.edu


Corresponding author.

J. Mech. Des 131(6), 061014 (May 21, 2009) (10 pages) doi:10.1115/1.3116262 History: Received July 03, 2007; Revised February 25, 2009; Published May 21, 2009

The increased use of micro-electro-mechanical systems (MEMS) as key components for actuation and sensing purposes in novel devices and systems emphasizes the need for optimal design methods. Stochastic variations in manufacturing and operational conditions must be considered in order to meet performance goals. This study proposes a reliability based design optimization methodology for the design of geometrically complex electrostatically actuated MEMS. The first order reliability method is used for reliability analysis of fully-coupled electrostatic-mechanical problems. A general methodology for predicting the instability phenomenon of pull-in and incorporating it into an automatic optimization process is proposed and verified with analytical and experimental results. The potential of this methodology is illustrated with the design of an analog micromirror.

Copyright © 2009 by American Society of Mechanical Engineers
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Figure 1

Nested-loop RBDO method

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Figure 2

Parallel plate capacitor

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Figure 3

Voltage-displacement relationship for parallel plate capacitor

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Figure 4

Eigenvalue versus voltage for parallel plate capacitor

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Figure 5

Experimental and numerical pull-in voltages for varying beam lengths

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Figure 6

Torsional mirror device (51): (a) main dimensions of mirror with the dashed lines marking areas covered by electrodes; for the design problem studied voltage is applied to only one electrode (dark patch); (b) design element model

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Figure 7

Shape variations

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Figure 8

Optimized devices for (a) the deterministic problem and (b) the RBDO formulation; nominal design is represented by dashed lines




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