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Research Papers

Designing Piezoelectric Interdigitated Microactuators Using Finite Element Analysis

[+] Author and Article Information
Oliver J. Myers1

 Mississippi State University, Mississippi State, MS 39762myers@me.msstate.edu

M. Anjanappa

 University of Maryland Baltimore County, 1000 Hilltop Circle, Baltimore, MD 21250anjanap@umbc.edu

C. Freidhoff

Electronics Systems Sector, Northrop Grumman Corporation, P.O. Box 1521, MS C-150, Baltimore, MD 21203carl.freidhoff@ngc.com

1

Corresponding author.

J. Mech. Des 132(6), 061004 (May 20, 2010) (11 pages) doi:10.1115/1.4001596 History: Received May 28, 2009; Revised March 17, 2010; Published May 20, 2010; Online May 20, 2010

This paper presents a methodology toward designing, analyzing, and optimizing piezoelectric interdigitated microactuators using multiphysics finite element analysis. The models used in this paper were based on a circularly interdigitated design that takes advantage of primarily the d33 electromechanical piezoelectric constant coefficient. Because of the symmetric nature of the devices, a small number of 2D axisymmetric parametric models were developed to characterize the behavior of the diaphragms. The parametric models offered a large range of possible results from a very small number of models. The variations in the design parameters and their effects on deflection were captured using these models. The models also showed that several of the design parameters were naturally coupled. Discrete models were then used to capture the variations in the key design parameters during fabrication. The numerical models correlate well to the maximum deflection of the experimental devices.

Copyright © 2010 by American Society of Mechanical Engineers
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References

Figures

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Figure 2

Notional view of the measured residual stresses in the SiO2, ZrO2, and PZT layers used as internal boundary conditions in the respective layers. Assumed no residual stresses in Al2O3 layer.

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Figure 6

Deflection versus electrode separation

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Figure 7

Deflection versus center disk diameter and electrode separation

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Figure 17

Corrected numerical versus experimental deflection comparison of 650 μm diameter actuator with 210 μm center disk

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Figure 18

Simulation results of the electric field in 650 μm diameter diaphragm with 210 μm center disk at 180 V

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Figure 1

Digital scan of a 460 μm diameter piezoelectric interdigitated diaphragm

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Figure 3

Deflection versus piezoelectric material thickness

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Figure 4

Simulated boundary conditions

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Figure 5

Deflection versus clamping boundary conditions

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Figure 10

Parametric model deflection of diaphragm with 1.00 μm PZT, varying electrode width and pitch

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Figure 11

Parametric model deflection of diaphragm with 2.00 μm PZT, varying electrode width and pitch

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Figure 12

Static deflection measurement setup

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Figure 13

Corrected numerical versus experimental deflection comparison of 650 μm diameter actuator with 90 μm center disk

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Figure 14

Simulation results of the electric field in 650 μm diameter diaphragm with 90 μm center disk at 180 V

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Figure 15

Corrected numerical versus experimental deflection comparison of 650 μm diameter actuator with 150 μm center disk

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Figure 16

Simulation results of the electric field in 650 μm diameter diaphragm with 150 μm center disk at 180 V

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Figure 8

Parametric model deflection of diaphragm of 1 μm wide electrodes and 9 μm pitch

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Figure 9

Parametric model deflection of diaphragm of 2 μm wide electrodes and 8 μm pitch

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