Design Methodology for Microelectromechanical Systems. Case Study: Torsional Scanner Mirror

[+] Author and Article Information
Faik Can Meral, Ipek Basdogan

Department of Mechanical Engineering, Koc University, Sariyer, Istanbul 80910, Turkey

J. Mech. Des 129(10), 1023-1030 (Dec 15, 2006) (8 pages) doi:10.1115/1.2756087 History: Received May 04, 2006; Revised December 15, 2006

Future optical microsystems, such as microelectromechanical system (MEMS) scanners and micromirrors, will extend the resolution and sensitivity offered by their predecessors. These systems face the challenge of achieving nanometer precision subjected to various disturbances. Predicting the performance of such systems early in the design process can significantly impact the design cost and also improve the quality of the design. Our approach aims to predict the performance of such systems under various disturbance sources and develop a generalized design approach for MEMS structures. In this study, we used ANSYS for modeling and dynamic analysis of a torsional MEMS scanner mirror. ANSYS modal analysis results, which are eigenvalues (natural frequencies) and eigenvectors (mode shapes), are used to obtain the state-space representation of the mirror. The state-space model of the scanner mirror was reduced using various reduction techniques to eliminate the states that are insignificant for the transfer functions of interest. The results of these techniques were compared to obtain the best approach to obtain a lower order model that still contains all the relevant dynamics of the original model. After the model size is reduced significantly, a disturbance analysis is performed using Lyapunov approach to obtain root-mean-square values of the mirror rotation angle under the effect of a disturbance torque. The magnitude levels of the disturbance torque are obtained using an experimental procedure. The disturbance analysis framework is combined with the sensitivity analysis to determine the critical design parameters for optimizing the system performance.

Copyright © 2007 by American Society of Mechanical Engineers
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Figure 2

Finite element models of the MEMS torsional scanner: (a) FEM with 3D solid elements showing the design parameters and (b) simplified FEM with beam and shell elements

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Figure 1

Suggested design process flow for MEMS devices

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Figure 3

Reduced Models are obtained using (a) the first six modes, (b) “mdc” approach, and (c) “dc gain” and “peak gain” approach

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Figure 4

Schematic of the disturbance measurement procedure

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Figure 5

(a) LDV measurement point to observe the torsional mode of the outer frame. (b) Schematic view of the LDV measurement setup (small angle θ assumption).

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Figure 6

Time history of the (a) angular position variance (b) disturbance torque variance

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Figure 7

Disturbance shaping filter connected in series with the mirror model



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