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RESEARCH PAPERS

Constraint-Based Design of Parallel Kinematic XY Flexure Mechanisms

[+] Author and Article Information
Shorya Awtar1

Precision Engineering Research Group, Massachusetts Institute of Technology, Cambridge, MA 01239shorya@mit.edu

Alexander H. Slocum

Precision Engineering Research Group, Massachusetts Institute of Technology, Cambridge, MA 01239slocum@mit.edu

1

Author to whom correspondence should be addressed.

J. Mech. Des 129(8), 816-830 (May 25, 2006) (15 pages) doi:10.1115/1.2735342 History: Received January 17, 2006; Revised May 25, 2006

This paper presents parallel kinematic XY flexure mechanism designs based on systematic constraint patterns that allow large ranges of motion without causing over-constraint or significant error motions. Key performance characteristics of XY mechanisms such as mobility, cross-axis coupling, parasitic errors, actuator isolation, drive stiffness, lost motion, and geometric sensitivity, are discussed. The standard double parallelogram flexure module is used as a constraint building-block and its nonlinear force-displacement characteristics are employed in analytically predicting the performance characteristics of two proposed XY flexure mechanism designs. Fundamental performance tradeoffs, including those resulting from the nonlinear load-stiffening and elastokinematic effects, in flexure mechanisms are highlighted. Comparisons between closed-form linear and nonlinear analyses are presented to emphasize the inadequacy of the former. It is shown that geometric symmetry in the constraint arrangement relaxes some of the design tradeoffs, resulting in improved performance. The nonlinear analytical predictions are validated by means of computational finite element analysis and experimental measurements.

Copyright © 2007 by American Society of Mechanical Engineers
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Figures

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Figure 1

Proposed constraint arrangement for XY flexure mechanisms

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Figure 2

XY flexure mechanism Design 1

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Figure 3

XY flexure mechanism Design 2

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Figure 4

Double parallelogram flexure module

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Figure 5

XY Mechanism 1 in a deformed configuration

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Figure 6

Primary motion: CFA (–) and FEA (엯)

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Figure 7

Cross-axis error motion: CFA (–) and FEA (엯)

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Figure 8

Lost motion/drive stiffness: CFA (–) and FEA (엯)

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Figure 9

Actuator isolation: CFA (–) and FEA (엯)

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Figure 10

Motion stage rotation: CFA (contour), CFA (–) and FEA (엯)

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Figure 11

Moment sensitivity and COS for the stages with respect X force: CFA (–) and FEA (엯)

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Figure 12

Stage 1 rotation: CFA (–) and FEA (엯)

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Figure 13

Stage 2 rotation: CFA (–) and FEA (엯)

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Figure 14

XY Mechanism 2 in a deformed configuration

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Figure 15

Primary motion: CFA (–), FEA (엯), Exp (*)

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Figure 16

Cross-axis error motion: CFA (–), FEA (엯), Exp (*)

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Figure 17

Lost motion/drive stiffness: CFA (–), FEA (엯), Exp (*)

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Figure 18

Actuator isolation: CFA (–), FEA (엯), Exp (*)

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Figure 19

Motion stage rotation: CFA (contour), CFA (lines) and FEA (marks)

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Figure 20

Moment sensitivity and COS for the stages with respect Y force: CFA (–) and FEA (엯)

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Figure 21

Stage 1 rotation: CFA (–) and FEA (엯)

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Figure 22

Stage 2 rotation: CFA (–) and FEA (엯)

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Figure 23

Experimental setup

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