A Linear Scheme for the Displacement Analysis of Micropositioning Stages with Flexure Hinges

[+] Author and Article Information
I. Her, J. C. Chang

Department of Mechanical Engineering, National Sun Yat-Sen University, Kaohsiung, Taiwan 80424, R.O.C.

J. Mech. Des 116(3), 770-776 (Sep 01, 1994) (7 pages) doi:10.1115/1.2919449 History: Received June 01, 1993; Revised October 01, 1993; Online June 02, 2008


In this paper we present an analytical scheme for the displacement analysis of micropositioning stages with flexure hinges. The proposed scheme is based on linearization of the geometric constraint equations of the stage structure. A design chart for evaluating the stiffness of the flexure hinge is also presented in this paper. This chart provides more accurate estimations than the design formula presently in use. The proposed linear scheme is general, easy to use, yet capable of obtaining results close to those obtained from the finite element analysis.

Copyright © 1994 by The American Society of Mechanical Engineers
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